ASYS is one of the pioneers in the field of High-Clean Handling. Taking into consideration the EUV lithography’s concepts, our robots have been developed for grease-free environments.
Our robots do not emit any sort of VOC (volatile organic compounds) while having a very small particle emission at the same time. This makes them suitable for VOC-sensitive environments and also for low-particle environments in which even tiny particles of <30nm can cause damage.
ASYS’ robots are even suitable for toxic or otherwise contaminated environments, as their sealing is monitored and guaranteed at all times.